Title:
OXIDE SUPERCONDUCTOR THIN-FILM WIRING MATERIAL, AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2013/153651
Kind Code:
A1
Abstract:
Provided is an oxide superconductor thin-film wiring material obtained by forming an oxide superconductor thin film on a substrate using metal organic deposition. The porosity of the oxide superconductor thin film is not more than 10%. The oxide superconductor thin film is formed by metal organic deposition using a metal organic compound which does not include fluorine. A production method for the oxide superconductor thin-film wiring material is provided with: an applied-film producing step in which a solution of the metal organic compound is applied to a substrate to produce an applied film; a preliminary calcination step in which organic components included in the metal organic compound of the applied film are thermally decomposed and removed to produce a preliminary-calcination film; and a principal calcination step in which the preliminary-calcination film is crystallized to produce the oxide superconductor thin film. The rate of the temperature increase in the preliminary calcination step is not more than 2˚C/min.
Inventors:
YAMAGUCHI IWAO (JP)
MANABE TAKAAKI (JP)
HIKATA TAKESHI (JP)
KUMAGAI TOSHIYA (JP)
MATSUI HIROAKI (JP)
SOUMA MITSUGU (JP)
YAMAZAKI HIROFUMI (JP)
MUKAIDA MASASHI (JP)
YAMAGUCHI TAKASHI (JP)
SATOU KENICHI (JP)
NAGAISHI TATSUOKI (JP)
TANEDA TAKAHIRO (JP)
NAKANISHI TSUYOSHI (JP)
OHKI KOTARO (JP)
HONDA GENKI (JP)
HANAFUSA KEI (JP)
MANABE TAKAAKI (JP)
HIKATA TAKESHI (JP)
KUMAGAI TOSHIYA (JP)
MATSUI HIROAKI (JP)
SOUMA MITSUGU (JP)
YAMAZAKI HIROFUMI (JP)
MUKAIDA MASASHI (JP)
YAMAGUCHI TAKASHI (JP)
SATOU KENICHI (JP)
NAGAISHI TATSUOKI (JP)
TANEDA TAKAHIRO (JP)
NAKANISHI TSUYOSHI (JP)
OHKI KOTARO (JP)
HONDA GENKI (JP)
HANAFUSA KEI (JP)
Application Number:
PCT/JP2012/060015
Publication Date:
October 17, 2013
Filing Date:
April 12, 2012
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
YAMAGUCHI IWAO (JP)
MANABE TAKAAKI (JP)
HIKATA TAKESHI (JP)
KUMAGAI TOSHIYA (JP)
MATSUI HIROAKI (JP)
SOUMA MITSUGU (JP)
YAMAZAKI HIROFUMI (JP)
MUKAIDA MASASHI (JP)
YAMAGUCHI TAKASHI (JP)
SATOU KENICHI (JP)
NAGAISHI TATSUOKI (JP)
TANEDA TAKAHIRO (JP)
NAKANISHI TSUYOSHI (JP)
OHKI KOTARO (JP)
HONDA GENKI (JP)
HANAFUSA KEI (JP)
YAMAGUCHI IWAO (JP)
MANABE TAKAAKI (JP)
HIKATA TAKESHI (JP)
KUMAGAI TOSHIYA (JP)
MATSUI HIROAKI (JP)
SOUMA MITSUGU (JP)
YAMAZAKI HIROFUMI (JP)
MUKAIDA MASASHI (JP)
YAMAGUCHI TAKASHI (JP)
SATOU KENICHI (JP)
NAGAISHI TATSUOKI (JP)
TANEDA TAKAHIRO (JP)
NAKANISHI TSUYOSHI (JP)
OHKI KOTARO (JP)
HONDA GENKI (JP)
HANAFUSA KEI (JP)
International Classes:
H01B12/06; C01G1/00; H01B13/00; H01L39/24
Foreign References:
| JP2010049891A | 2010-03-04 | |||
| JP2011230946A | 2011-11-17 | |||
| JP2012043734A | 2012-03-01 | |||
| JP2011198469A | 2011-10-06 |
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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