Title:
OXYGEN-RICH VANADIUM OXIDE ELECTROMAGNETIC WAVE SENSOR AND SYSTEM USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/050233
Kind Code:
A1
Abstract:
Provided are an oxygen-rich vanadium oxide electromagnetic wave sensor and a system using the same. An oxygen-rich vanadium oxide electromagnetic wave sensor according to an embodiment of the present invention comprises: a first material layer comprising silicon doped with an n-type dopant; a second material layer disposed on the first material layer and comprising a vanadium oxide represented by the molecular formula VxOy; a first electrode on the second material layer; and a second electrode on the first material layer or the second material layer, wherein the dopant concentration of the first material layer may be more than 1.0 x 1015 cm-3 but less than 1.0 x 1019 cm-3, and the ratio of y to x may be greater than 2 but smaller than 2.5 in the molecular formula.
Inventors:
KIM HYUN-TAK (KR)
CHO JIN CHEOL (KR)
SLUSAR TETIANA (KR)
CHO JIN CHEOL (KR)
SLUSAR TETIANA (KR)
Application Number:
PCT/KR2018/010216
Publication Date:
March 14, 2019
Filing Date:
September 03, 2018
Export Citation:
Assignee:
ELECTRONICS & TELECOMMUNICATIONS RES INST (KR)
International Classes:
H01L31/08; G01J1/02; H01L31/0224; H01L31/032; H01L31/048
Foreign References:
| KR20160145040A | 2016-12-19 | |||
| KR100308638B1 | 2002-04-24 | |||
| KR101290590B1 | 2013-07-30 |
Other References:
JOUSHAGHANI, ARASH ET AL.: "Wavelength-size Hybrid Si-V02 Waveguide Electtoabsoiption Optical Switches and Photodetectors", OPTICS EXPRESS, DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING, vol. 23, no. 3, 5 February 2015 (2015-02-05), pages 3657 - 3668, XP055581656, DOI: 10.1364/OE.23.003657
GERLING, LUIS G . ET AL.: "Characterization of Transition Metal Oxide/Silicon Heterojunctions for Solar Cell Applications", APPLIED SCIENCES, vol. 5, 10 October 2015 (2015-10-10), pages 695 - 705, XP055262574, DOI: doi:10.3390/app5040695
GERLING, LUIS G . ET AL.: "Characterization of Transition Metal Oxide/Silicon Heterojunctions for Solar Cell Applications", APPLIED SCIENCES, vol. 5, 10 October 2015 (2015-10-10), pages 695 - 705, XP055262574, DOI: doi:10.3390/app5040695
Attorney, Agent or Firm:
KORYO IP & LAW (KR)
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