OZONE GAS SUPPLY SYSTEM

WIPO Patent Application WO/2011/065088

A1

Disclosed is an ozone-generating unit wherein the ozone-generating unit, to which a control means that has a plurality of means for outputting ozone gas, is miniaturized. Further disclosed is the obtaining of the abovementioned ozone-generating unit. Furthermore, a gas ductwork collecting block (30) has a plurality of internal ductwork paths (R30a-R30f), and by means of this plurality of internal ductwork paths, an ozone generator (1), a control means (MFC(3), gas filter (51), and APC (4)), a starting-gas supply port (14), an ozone gas output port (15), and a coolant inlet/outlet (13A, 13B) being connected, a starting-gas input ductwork path from the starting-gas supply port to the ozone gas generator with the APC therebetween, and an ozone gas output ductwork path from the ozone generator to the ozone gas output port with the gas filter, an ozone concentration meter (5), and the MFC (3) therewbetween, can be formed as an integrated unit.

OKIHARA YUUJIROU (JP)
TABATA YOUICHIROU (JP)
NAKAMURA NORIYUKI (JP)
SAITSU TETSUYA (JP)
YOTSUMOTO HATSUO (JP)
ITOU NOBUYUKI (JP)

PCT/JP2010/065210

June 03, 2011

September 06, 2010

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TOSHIBA MITSUBISHI ELEC INC (JP)
OKIHARA YUUJIROU (JP)
TABATA YOUICHIROU (JP)
NAKAMURA NORIYUKI (JP)
SAITSU TETSUYA (JP)
YOTSUMOTO HATSUO (JP)
ITOU NOBUYUKI (JP)

C01B13/11

JP2003212517A	2003-07-30
JPS54115689A	1979-09-08
JP2003089508A	2003-03-28
JP2009500855A	2009-01-08
JPH11171505A	1999-06-29
JP2009500855A	2009-01-08

See also references of EP 2505550A4

YOSHITAKE Hidetoshi et al. (JP)
Hidetoshi Yoshitake (JP)

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