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Patent Searching and Data


Title:
OZONE GENERATOR AND OZONE GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/073686
Kind Code:
A1
Abstract:
In the past, plasma generation in decompression chambers has been used to generate ozone used for ashing and plasma cleaning. However, decompression processes make it difficult to reduce ozone generation costs due to high equipment costs and process costs. The present invention is configured such that a plasma head comprising a plurality of plasma head unit members, which apply an electrical or magnetic field via a dielectric member to generate plasma, arranged in parallel is used to generate ozone by plasma chemical vapor deposition (CVD) at atmospheric pressure, by dielectric barrier discharge. A stable glow discharge plasma can be formed by dielectric discharge, even at atmospheric pressure, enabling ozone to be generated at atmospheric pressure, and, for example, enabling low-cost semiconductor devices to be manufactured.

Inventors:
KUSUHARA, Masaki (2-16 Nihonbashi-Muromachi 4-chome, Chuo-k, Tokyo 22, 〒1030022, JP)
Application Number:
JP2013/080469
Publication Date:
May 15, 2014
Filing Date:
November 11, 2013
Export Citation:
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Assignee:
WACOM (2-16, Nihonbashi-Muromachi 4-chome Chuo-k, Tokyo 22, 〒1030022, JP)
International Classes:
C01B13/11; H01L21/3065; H01T23/00
Foreign References:
JP2000200697A2000-07-18
JPH08185955A1996-07-16
JPH01177241U1989-12-18
JP2002068713A2002-03-08
JPH04108603A1992-04-09
JP2001079446A2001-03-27
JP2537304B21996-09-25
JPH03219082A1991-09-26
Attorney, Agent or Firm:
FUKUMORI, Hisao (3rd Floor, Yano Building 5, Kandakonya-cho, Chiyoda-k, Tokyo 35, 〒1010035, JP)
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