Title:
OZONE SUPPLY DEVICE AND OZONE SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2019/234882
Kind Code:
A1
Abstract:
The present invention includes: an adsorption operation in which ozonated gas generated by an ozone generating unit (2) is adsorbed in a first adsorption/desorption region (5a) and a second adsorption/desorption region (5b) of an adsorption/desorption tower (4); a condensing operation in which the ozonated gas is desorbed from the first adsorption/desorption region (5a), adsorbed in the second adsorption/desorption region (5b), and recovered therein; and a supply operation in which, while a raw-material gas from a raw-material gas source (1a) is conveyed, the ozonated gas recovered in the second adsorption/desorption region (5b) is desorbed and is supplied to the outside of the adsorption/desorption tower (4) from the first adsorption/desorption region (5a).
Inventors:
MATSUURA YOKO (JP)
WADA NOBORU (JP)
OINUMA GAKU (JP)
WADA NOBORU (JP)
OINUMA GAKU (JP)
Application Number:
PCT/JP2018/021845
Publication Date:
December 12, 2019
Filing Date:
June 07, 2018
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
C01B13/10
Foreign References:
| JPS5481192A | 1979-06-28 | |||
| JP2010195673A | 2010-09-09 | |||
| JP2013040077A | 2013-02-28 | |||
| JPH1143307A | 1999-02-16 | |||
| JPH1143310A | 1999-02-16 |
Attorney, Agent or Firm:
MURAKAMI Keigo et al. (JP)
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