Title:
PACKAGING ATMOSPHERE AND METHOD OF PACKAGING A MEMS DEVICE
Document Type and Number:
WIPO Patent Application WO2002027381
Kind Code:
A9
Abstract:
The power handling capabilities and operational lifetime of a MEMS device, e.g., a MEMS mirror, operating in a high intensity optical beam environment are enhanced by packaging the device in an packaging atmosphere having a suitably high thermal conductivity, preferably exceeding that of air. The packaging atmosphere can be selected to provide a desired level of heat loss from the MEMS device.
Inventors:
HENSHALL GORDON (GB)
ROLT STEPHEN (GB)
ROLT STEPHEN (GB)
Application Number:
PCT/GB2001/004360
Publication Date:
July 04, 2002
Filing Date:
September 28, 2001
Export Citation:
Assignee:
NORTEL NETWORKS LTD (CA)
HENSHALL GORDON (GB)
ROLT STEPHEN (GB)
HENSHALL GORDON (GB)
ROLT STEPHEN (GB)
International Classes:
G02B26/08; (IPC1-7): G02B26/00
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