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Title:
PACKAGING STRUCTURE AND PACKAGING METHOD THEREFOR, PHOTOELECTRIC APPARATUS, RECEIVING UNIT AND LASER RADAR
Document Type and Number:
WIPO Patent Application WO/2023/206974
Kind Code:
A1
Abstract:
A packaging structure and packaging method therefor, a photoelectric apparatus, a receiving unit and a laser radar. The packaging method comprises: providing a packaging loading plate; arranging a device structure on the packaging loading plate, the device structure comprising a photoelectric device, the photoelectric device comprising a first surface facing away from the packaging loading plate, and the first surface comprising a working area; arranging a step-shaped placeholder at the top of the working area of the photoelectric device, the placeholder comprising a first part and a second part, and the transverse dimensions of the first part being smaller than the transverse dimensions of the second part; forming at the photoelectric device and at a side part of the placeholder a packaging layer located at the top of the packaging loading plate, the packaging layer covering the photoelectric device and the side wall of the placeholder; removing the placeholder, forming in the packaging layer an opening having a step, the opening comprising a first opening and a second opening, and the first opening exposing the working area; providing a light-transmitting part in the second opening, the light-transmitting part being located on the step; and a cavity being encircled by the light-transmitting part, the packaging layer on the side wall of the first opening and the photoelectric device of the working area. The performance of the packaging structure is improved.

Inventors:
LI CHAO (CN)
WU WEI (CN)
WANG JI (CN)
TAO JUN (CN)
LI LEI (CN)
XIANG SHAOQING (CN)
Application Number:
PCT/CN2022/124125
Publication Date:
November 02, 2023
Filing Date:
October 09, 2022
Export Citation:
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Assignee:
HESAI TECHNOLOGY CO LTD (CN)
International Classes:
G01S7/481; H01L31/0203
Foreign References:
CN114883275A2022-08-09
CN217470072U2022-09-20
CN109246348A2019-01-18
US20040212055A12004-10-28
CN205883378U2017-01-11
CN103323000A2013-09-25
CN210072645U2020-02-14
Attorney, Agent or Firm:
INTEBRIGHT LLP (CN)
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