Title:
PACKAGING STRUCTURE AND PACKAGING METHOD THEREFOR, PHOTOELECTRIC APPARATUS, RECEIVING UNIT AND LASER RADAR
Document Type and Number:
WIPO Patent Application WO/2023/206974
Kind Code:
A1
Abstract:
A packaging structure and packaging method therefor, a photoelectric apparatus, a receiving unit and a laser radar. The packaging method comprises: providing a packaging loading plate; arranging a device structure on the packaging loading plate, the device structure comprising a photoelectric device, the photoelectric device comprising a first surface facing away from the packaging loading plate, and the first surface comprising a working area; arranging a step-shaped placeholder at the top of the working area of the photoelectric device, the placeholder comprising a first part and a second part, and the transverse dimensions of the first part being smaller than the transverse dimensions of the second part; forming at the photoelectric device and at a side part of the placeholder a packaging layer located at the top of the packaging loading plate, the packaging layer covering the photoelectric device and the side wall of the placeholder; removing the placeholder, forming in the packaging layer an opening having a step, the opening comprising a first opening and a second opening, and the first opening exposing the working area; providing a light-transmitting part in the second opening, the light-transmitting part being located on the step; and a cavity being encircled by the light-transmitting part, the packaging layer on the side wall of the first opening and the photoelectric device of the working area. The performance of the packaging structure is improved.
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Inventors:
LI CHAO (CN)
WU WEI (CN)
WANG JI (CN)
TAO JUN (CN)
LI LEI (CN)
XIANG SHAOQING (CN)
WU WEI (CN)
WANG JI (CN)
TAO JUN (CN)
LI LEI (CN)
XIANG SHAOQING (CN)
Application Number:
PCT/CN2022/124125
Publication Date:
November 02, 2023
Filing Date:
October 09, 2022
Export Citation:
Assignee:
HESAI TECHNOLOGY CO LTD (CN)
International Classes:
G01S7/481; H01L31/0203
Foreign References:
CN114883275A | 2022-08-09 | |||
CN217470072U | 2022-09-20 | |||
CN109246348A | 2019-01-18 | |||
US20040212055A1 | 2004-10-28 | |||
CN205883378U | 2017-01-11 | |||
CN103323000A | 2013-09-25 | |||
CN210072645U | 2020-02-14 |
Attorney, Agent or Firm:
INTEBRIGHT LLP (CN)
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