Title:
PAD PATTERN REPAIR APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/126307
Kind Code:
A2
Abstract:
The present invention relates to a pad pattern repair apparatus. The present invention provides an apparatus for repairing defects in pad electrodes equipped for applying signals to one of multiple substrates, comprising a stage into the reference surface of which the substrate is loaded; a chamber where a first exhaust, a shield gas outlet, and a second exhaust are formed sequentially in the lower surface of the chamber with respect to a laser light emission hole being equipped on the stage and moving to the defect position of the pad electrode and having structure to discharge purifying gas and raw gas in the middle of the hole; and a clamp being installed on the stage and supporting the opposite surface of a substrate adhered closely to the reference surface, the gap between the substrate and the lower surface of the chamber varying in the inside and outside of the lower surface of the chamber. A pad pattern repair apparatus according to the present invention maintains the pressure in the area where repairing a defect is carried out at a constant level, improving a process yield.
Inventors:
KIM SEON JOO (KR)
KIM WOO JIN (KR)
PARK SUNG HUN (KR)
LEE HYO SUNG (KR)
KIM WOO JIN (KR)
PARK SUNG HUN (KR)
LEE HYO SUNG (KR)
Application Number:
PCT/KR2011/002423
Publication Date:
October 13, 2011
Filing Date:
April 06, 2011
Export Citation:
Assignee:
COWINDST CO LTD (KR)
KIM SEON JOO (KR)
KIM WOO JIN (KR)
PARK SUNG HUN (KR)
LEE HYO SUNG (KR)
KIM SEON JOO (KR)
KIM WOO JIN (KR)
PARK SUNG HUN (KR)
LEE HYO SUNG (KR)
International Classes:
G01R1/06; G02F1/1345; H01L21/66
Foreign References:
| KR20090028347A | 2009-03-18 | |||
| KR20090068824A | 2009-06-29 | |||
| KR20080017767A | 2008-02-27 |
Attorney, Agent or Firm:
KIM, In Han et al. (80 Soosong-Dong, Chongro-Ku, Seoul 110-733, KR)
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Claims: