PARALLEL PLATE CAPACITOR AND ACCELERATION SENSOR COMPRISING SAME

Title:

PARALLEL PLATE CAPACITOR AND ACCELERATION SENSOR COMPRISING SAME

Document Type and Number:

WIPO Patent Application WO/2014/059832

Kind Code:

A1

Abstract:

A parallel plate capacitor, comprising a first polar plate (10), and a second polar plate disposed opposite to the first polar plate (10). The parallel plate capacitor further comprises at least a pair of sensitive units disposed on a substrate forming the first polar plate (10); the sensitive units comprise sensitive elements (21a, 21b, 22a, 22b) and element connecting arms (23a, 23b, 24a, 24b) connecting the sensitive elements (21a, 21b, 22a, 22b) to the first polar plate (10). The parallel plate capacitor further comprises anchoring bases (30, 31, 32, 33) disposed on a substrate where the second polar plate is located; the anchoring bases (30, 31, 32, 33) are connected to the element connecting arms (23a, 23b, 24a, 24b) via cantilever beams (30a, 30b, 31a, 31b, 32a, 32b, 33a, 33b); each element connecting arm (23a, 23b, 24a, 24b) is connected to at least two anchoring bases (30, 31, 32, 33) symmetrical therewith. The parallel plate capacitor is more likely to be influenced by an external factor, thus being more likely to experience capacitance change. Also disclosed is an acceleration sensor comprising the parallel plate capacitor.

Inventors:

GUO MEIHAN (CN)
ZHANG XINWEI (CN)
XIA CHANGFENG (CN)
SU WEI (CN)

Application Number:

PCT/CN2013/082626

Publication Date:

April 24, 2014

Filing Date:

August 30, 2013

Export Citation:

Click for automatic bibliography generation Help

Assignee:

CSMC TECHNOLOGIES FAB1 CO LTD (CN)

International Classes:

G01P15/125

Foreign References:

CN1959417A	2007-05-09
CN1847857A	2006-10-18
CN1529172A	2004-09-15
CN1752757A	2006-03-29
CN1844933A	2006-10-11
CN1844934A	2006-10-11
CN102608356A	2012-07-25
US20050132803A1	2005-06-23
US20070089519A1	2007-04-26

Other References: