Title:
PART FOR VACUUM PUMPS AND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2014/021160
Kind Code:
A1
Abstract:
[Problem] To provide a part for vacuum pumps and a vacuum pump for which a coating can be suitably formed on the surface of a fiber reinforced composite material. [Solution] A part for a vacuum pump is a cylindrical second cylinder member (62) made from a fiber reinforced composite material whereon a plating layer (626), which is the coating, is formed as the coating layer, on the surface thereof. The plating layer (626) is formed after a removal step of removing a portion of the surface containing a release agent layer (622) from the surface of the cylindrical second cylinder member (62), and a surface roughening step of roughening the surface (623) of the second cylinder member (62) after removing the portion of the surface containing the release agent layer (622).
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Inventors:
KABASAWA TAKASHI (JP)
NONAKA MANABU (JP)
NONAKA MANABU (JP)
Application Number:
PCT/JP2013/070021
Publication Date:
February 06, 2014
Filing Date:
July 24, 2013
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JPH074383A | 1995-01-10 | |||
| JP2004256903A | 2004-09-16 | |||
| JP2004278512A | 2004-10-07 | |||
| JPH074383A | 1995-01-10 | |||
| JP2004278512A | 2004-10-07 |
Other References:
See also references of EP 2881590A4
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