Title:
PARTIALLY ANODIZED SHOWERHEAD
Document Type and Number:
WIPO Patent Application WO/2019/109207
Kind Code:
A1
Abstract:
Embodiments disclosed herein generally relate to an apparatus having a partially anodized gas distribution showerhead including a body having a plurality of gas passages extending therethrough from an upstream side to a downstream side, the body having a center region and a peripheral region, the peripheral region having an anodized layer disposed on the upstream side and the downstream side.
Inventors:
YU YUE (CN)
Application Number:
PCT/CN2017/114443
Publication Date:
June 13, 2019
Filing Date:
December 04, 2017
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
YU YUE (CN)
YU YUE (CN)
International Classes:
H01L21/205; H05H1/34
Domestic Patent References:
| WO2010132716A2 | 2010-11-18 | |||
| WO2006017136A2 | 2006-02-16 |
Foreign References:
| US20140118751A1 | 2014-05-01 |
Attorney, Agent or Firm:
LECOME INTELLECTUAL PROPERTY AGENT LTD. (CN)
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