Title:
PARTICLE ANALYZING DEVICE, AND PARTICLE ANALYZING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/249343
Kind Code:
A1
Abstract:
This particle analyzing device for analyzing a certain particle to be analyzed, using an electron microscope, with the particle placed on an implement: acquires a first reference value and a second reference value relating to brightness in an electron microscope image; acquires the electron microscope image and a signal profile, generated by irradiating the implement and the particle with an electron beam; and adjusts the brightness of the electron microscope image on the basis of the first reference value, the second reference value, and the signal profile.
Inventors:
HISADA AKIKO (JP)
OOMINAMI YUUSUKE (JP)
MATSUMOTO ERINO (JP)
OOMINAMI YUUSUKE (JP)
MATSUMOTO ERINO (JP)
Application Number:
PCT/JP2021/020018
Publication Date:
December 01, 2022
Filing Date:
May 26, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/28; G01N23/2251
Foreign References:
| JP2012142143A | 2012-07-26 | |||
| JP2014224793A | 2014-12-04 | |||
| JP2017072593A | 2017-04-13 | |||
| JP2014007032A | 2014-01-16 | |||
| US20160189369A1 | 2016-06-30 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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