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Patent Searching and Data


Title:
PARTICLE BEAM PROCESSING DEVICE SUCH AS AN ELECTRON BEAM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/026607
Kind Code:
A3
Abstract:
The invention relates to a particle beam processing device having a particle beam generator (7), and a vacuum chamber (101) comprising a chamber volume (V) that can be evacuated, wherein the vacuum chamber (101) has a chamber wall (1) with a first opening which is formed in the chamber wall (1). Said device also has a first cover (2) which is designed to cover the first opening (O1) and be rotated about a first rotational axis extending through the first opening, and a second opening which is formed in the first cover (2). Said device also has a second cover (3) which is designed to cover the second opening, be rotated about a second rotational axis extending through the second opening, and move the particle beam generator (7). The particle beam generator (7) can be displaced in a first direction (Z) within the chamber volume (V) that can be evacuated.

Inventors:
VOKURKA, Franz (Lindenweg 35, Dorf Tirol, 39019, IT)
Application Number:
EP2010/005350
Publication Date:
March 10, 2011
Filing Date:
August 31, 2010
Export Citation:
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Assignee:
GLOBAL BEAM TECHNOLOGIES AG (Emmy-Noether-Strasse 2, Maisach, 82216, DE)
VOKURKA, Franz (Lindenweg 35, Dorf Tirol, 39019, IT)
International Classes:
H01J37/16; B23K15/00; B23K15/06; G21K5/10; H01J37/30; H01J37/31
Foreign References:
US5700988A
FR2372509A1
US3588442A
US3761676A
US2771568A
US20090010772A1
DE102006047705A1
DE29520791U1
GB1404931A
Attorney, Agent or Firm:
SCHMIDTCHEN, Jürgen (Kramer Barske Schmidtchen, Landsberger Strasse 300, München, 80687, DE)
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