Title:
PARTICLE DETECTION DEVICE AND METHOD FOR INSPECTING PARTICLE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/199615
Kind Code:
A1
Abstract:
This particle detection device is provided with: an inspection light source 30 that emits inspection light; a flow cell 40 to be irradiated with the inspection light; and an oval mirror 50, which has a first focal point at the position of the flow cell 40, and which has a hole 51 that is provided at the peak.
Inventors:
FURUYA MASASHI (JP)
OBARA DAISUKE (JP)
OBARA DAISUKE (JP)
Application Number:
PCT/JP2017/014129
Publication Date:
November 23, 2017
Filing Date:
April 04, 2017
Export Citation:
Assignee:
AZBIL CORP (JP)
International Classes:
G01N15/14; G01N21/64; G01N21/65
Foreign References:
| JP2015227805A | 2015-12-17 | |||
| JP2009145044A | 2009-07-02 | |||
| JPS6258138A | 1987-03-13 | |||
| JP2006010585A | 2006-01-12 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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