Title:
PARTICLE DETECTION METHOD, PARTICLE DETECTION DEVICE AND PARTICLE DETECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/063912
Kind Code:
A1
Abstract:
This particle detection method for detecting particles in a sample includes the steps for: installing, in a stage portion, a fluid device which has a flow channel through which the particles can move; irradiating the flow channel with illumination light; detecting scattered light generated from the particles, by irradiation with the illumination light. In the irradiating step, the illumination light converges so that a transmittal area of a luminous flux of the illumination light, at a position of a first lateral surface on an illumination light incident side of the flow channel, is limited to within the first lateral surface.
Inventors:
ICHIKI TAKANORI (JP)
SUZUKI KUNO (JP)
TANAKA DAISHI (JP)
INOUE JIRO (JP)
OTA KAZUYA (JP)
SUZUKI KUNO (JP)
TANAKA DAISHI (JP)
INOUE JIRO (JP)
OTA KAZUYA (JP)
Application Number:
PCT/JP2015/079699
Publication Date:
April 28, 2016
Filing Date:
October 21, 2015
Export Citation:
Assignee:
UNIV TOKYO (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
G01N15/14; C12M1/34; C12M1/42; G01N37/00
Domestic Patent References:
WO2012147426A1 | 2012-11-01 | |||
WO2014030590A1 | 2014-02-27 |
Foreign References:
JPH05240872A | 1993-09-21 | |||
JP2006276000A | 2006-10-12 | |||
JP2014521110A | 2014-08-25 | |||
JP2003279471A | 2003-10-02 | |||
JP2008261740A | 2008-10-30 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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