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Title:
PARTICLE DIAMETER DISTRIBUTION MEASUREMENT DEVICE AND PROGRAM FOR PARTICLE DIAMETER DISTRIBUTION MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/070411
Kind Code:
A1
Abstract:
In order to provide a particle diameter distribution measurement device that is capable of determining the absolute number of particles that have a certain particle diameter and are included in an object to be measured, the present invention is provided with: a specific particle diameter optical intensity calculation unit 25 which calculates an optical intensity caused by a particle that has a specific particle diameter and is included in the object to be measured X on the basis of an actual optical intensity distribution obtained from an optical intensity signal and a theoretical optical intensity distribution calculated from the particle diameter; a correlation data storage unit 24 which stores the number of particles-optical intensity correlation data that is data obtained by using known samples of which the numbers of particles having the specific particle diameter are already known and represents a correlation between the number of particles, which have the specific particle diameter and are included in each of the known samples, and an integration value of optical intensity distributions respectively obtained from the known samples; and a particle number calculation unit 26 that calculates the number of particles, which have the specific particle diameter and are included in the object to be measured, on the basis of the optical intensity calculated by the specific particle diameter optical intensity calculation unit 25 and the number of particles-optical intensity correlation data.

Inventors:
YAMAGUCHI TETSUJI (JP)
SAKURAMOTO KEIJIRO (JP)
MORI TETSUYA (JP)
SUGASAWA HIROSUKE (JP)
Application Number:
PCT/JP2017/036794
Publication Date:
April 19, 2018
Filing Date:
October 11, 2017
Export Citation:
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Assignee:
HORIBA LTD (JP)
International Classes:
G01N15/02
Foreign References:
JP2000046719A2000-02-18
JP2000046722A2000-02-18
JP2001033375A2001-02-09
JP2007263876A2007-10-11
JP2013160514A2013-08-19
JP2011085465A2011-04-28
JP2008164539A2008-07-17
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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