Title:
PARTICLE MEASURING DEVICE, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2022/265220
Kind Code:
A1
Abstract:
A particle measuring device, according to the present invention, comprises: a measurement unit comprising first and second electrodes which are patterned on a base formed of a piezoelectric material so as to mutually transmit and receive signals, wherein the measurement unit measures the mass of particles by means of a change in the signals transmitted and received between the first and second electrodes; and an adsorption unit which is provided in an adsorption region provided between the first and second electrodes so as to adsorb fine particles according to a temperature change. According to the present invention, the device has a high adsorption rate and does not interfere with the resonance rate of the piezoelectric material, thereby having excellent particle measurement quality.
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Inventors:
KIM HOE JOON (KR)
JANG II RYU (KR)
JANG II RYU (KR)
Application Number:
PCT/KR2022/006221
Publication Date:
December 22, 2022
Filing Date:
May 02, 2022
Export Citation:
Assignee:
DAEGU GYEONGBUK INST SCIENCE & TECH (KR)
International Classes:
G01N15/10; G01N5/02; G01N15/02
Foreign References:
| KR20160139731A | 2016-12-07 | |||
| KR20050095964A | 2005-10-05 | |||
| JP2016065726A | 2016-04-28 | |||
| JP2015066510A | 2015-04-13 |
Other References:
JANG IL RYU: "Heater Integrated Quartz Crystal Microbalance Sensor for Atmospheric Fine Particle Mass", KOREAN ASSOCIATION FOR PARTICLE AND AEROSOL RESEARCH PROCEEDINGS, 28 October 2020 (2020-10-28), XP093015601, Retrieved from the Internet [retrieved on 20230119]
Attorney, Agent or Firm:
KIM, Youn Gwon (KR)
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