Title:
PARTICLE SAMPLING APPARATUS, ANALYSIS SYSTEM AND SAMPLING METHOD FOR DEVICE IN VACUUM ENVIRONMENT
Document Type and Number:
WIPO Patent Application WO/2023/024265
Kind Code:
A1
Abstract:
A particle sampling apparatus (10), analysis system and sampling method for a device in a vacuum environment. The particle sampling apparatus (10) comprises: an electrostatic trapping head (101), the electrostatic trapping head (101) comprising two electrode plates (102), i.e., one being a positive electrode plate, and the other one being a negative electrode plate, and further comprising electrode wiring posts (103) and an insulating base (104), the two electrode plates (102) being provided in parallel at an interval, the insulating base (104) being connected to a sample transfer rod (106) of a first magnetic rod (110), one end of each electrode wiring post (103) being connected to a corresponding electrode plate (102), and the other end being connected to the insulating base (104) and used for being connected to a power supply; and the first magnetic rod (110), comprising the sample transfer rod (106) and a magnetic driving portion (109) for driving the sample transfer rod (106) to move linearly. The sampling apparatus (10) can complete collection of particulate matters in a vacuum environment for an extreme ultraviolet lithography machine, and then a sample is transferred out of the vacuum environment for analysis. Therefore, high-resolution microscopic technologies such as a scanning electron microscope and a scanning tunneling microscope can be applied to analyze particulate matters having a particle size from several nanometers to microns.
Inventors:
LIU XIANGBO (CN)
CHENG RONG (CN)
ZHANG MING (CN)
ZHU YU (CN)
CHENG RONG (CN)
ZHANG MING (CN)
ZHU YU (CN)
Application Number:
PCT/CN2021/128664
Publication Date:
March 02, 2023
Filing Date:
November 04, 2021
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
International Classes:
G01N1/10
Foreign References:
| CN105628978A | 2016-06-01 | |||
| CN112299018A | 2021-02-02 | |||
| CN105363554A | 2016-03-02 | |||
| CN111257598A | 2020-06-09 | |||
| CN109013061A | 2018-12-18 | |||
| US20100075317A1 | 2010-03-25 |
Attorney, Agent or Firm:
GRANDER IP LAW FIRM (CN)
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