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Title:
PARTICULATE FILM LAMINATING APPARATUS AND PARTICULATE FILM LAMINATING METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/145847
Kind Code:
A1
Abstract:
A particulate film laminating apparatus (1) is provided with: a nanoparticle generating chamber (2), in which nanoparticles (12) of a metal material (9) are generated; a nanofiber generating chamber (3), in which a nanofiber (13) of a resin material (11) is generated; a laminating chamber (4), in which the nanoparticles (12) and the nanofiber (13) are film formed and laminated on a substrate (18); a nanoparticle film-forming region (15), in which the nanoparticles (12) are film formed in the film-forming chamber (4); a nanofiber film-forming region (16), in which the nanofiber (13) is film formed in the film-forming chamber (4); a moving unit (17), which moves the substrate (18) between the nanoparticle film-forming region (15) and the nanofiber film-forming region (16); an air-releasing unit (5), which releases air from the laminating chamber (4); and a cooling gas introducing unit (8), which introduces a cooling gas into each of the nanoparticle generating chamber (2) and the nanofiber generating chamber (3).

Inventors:
UCHIYAMA NAOKI (JP)
KANAI TOMOMI (JP)
Application Number:
PCT/JP2013/052196
Publication Date:
October 03, 2013
Filing Date:
January 31, 2013
Export Citation:
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Assignee:
ATSUMITEC KK (JP)
International Classes:
C23C14/06; C23C14/24; C23C14/56
Domestic Patent References:
WO2006019144A12006-02-23
Foreign References:
JPH10278171A1998-10-20
JP2000297361A2000-10-24
JP2000297361A2000-10-24
Other References:
See also references of EP 2832894A4
Attorney, Agent or Firm:
NAGATO, KANJI (JP)
Nagato δΎƒ 2 (JP)
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