PARTS FOR VACUUM FILM-FORMING DEVICE

WIPO Patent Application WO/2001/048260

A1

A part for a vacuum film-forming device which has a body thereof and a thermally sprayed coating, characterized in that the thermally sprayed coating has a roughness such that an average separation (S) between local mountaintops ranges 50 to 150 $g(m), and the maximum depth (Rv) of a valley and the maximum height (Rp) of a peak range 20 to 70 µm respectively; a target device comprising the thermally sprayed coating; and a vacuum film-forming device using the above part in a portion for holding a material to have a film formed thereon, a portion for holding a raw material of a film, a part for prevention of attaching, or the like. The thermally sprayed coating preferably comprises a low hardness coating selected from among an Al-based thermally sprayed coating having a Hv (Vickers hardness) of 30 or less, a Cu-based thermally sprayed coating having a Hv of 100 or less, a Ni-based thermally sprayed coating having a Hv of 200 or less, a Ti-based thermally sprayed coating having a Hv of 300 or less, a Mo-based thermally sprayed coating having a Hv of 300 or less and a W-based thermally sprayed coating having a Hv of 500 or less. The part for a vacuum film-forming device can be used for suppressing, effectively and stably, the exfoliation of the film-forming material attached onto the part during the process of film-forming and thus reducing the number of times for the cleaning of the device or the exchange of the part.

JPH0763689	[Title of the Invention] A method for arcing parts and an apparatus therefor
JP2001295051	METHOD OF TREATING OR COVERING SURFACE OF MATERIAL
JPH0789772	THERMAL SPRAYING METHOD OF CEMENT MATERIAL SURFACE AND THE THERMALLY SPRAYED CEMENT MATERIAL

SATO MICHIO (JP)
NAKAMURA TAKASHI (JP)
YABE YOICHIRO (JP)

PCT/JP2000/009379

July 05, 2001

December 28, 2000

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TOSHIBA KK (JP)
SATO MICHIO (JP)
NAKAMURA TAKASHI (JP)
YABE YOICHIRO (JP)

C23C4/00; C23C4/02; C23C4/08; C23C4/18; C23C14/56; C23C16/44; (IPC1-7): C23C14/00; C23C16/44; C23C4/00; B01J3/00; H01L21/205; H01L21/31; H01L21/203

JPH11345780A	1999-12-14
JPH09272965A	1997-10-21
JPH0762519A	1995-03-07
JPH10273339A	1998-10-13

Suyama, Saichi (Kanda-tacho 2-chome Chiyoda-ku Tokyo, JP)

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