Title:
PATTERN CORRECTION AMOUNT CALCULATION DEVICE, PATTERN CORRECTION AMOUNT CALCULATION METHOD, AND RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2016/063580
Kind Code:
A1
Abstract:
[Problem] To calculate an appropriate correction amount for each of two or more consecutive microscopic sides.
[Solution] Provided is a pattern correction amount calculation device for calculating the appropriate correction amount for each of two or more consecutive microscopic sides. The pattern correction amount calculation device comprises: a reception unit for receiving pattern information; a microscopic side set acquisition unit for acquiring a set of microscopic sides that is a set of two or more consecutive microscopic sides configuring the contour line of a graphic pattern represented by the pattern information, the microscopic sides being small enough to satisfy predetermined conditions; a virtual side acquisition unit for acquiring a virtual side that is a side for approximating the two or more microscopic sides included in the set of microscopic sides; a virtual side correction amount calculation unit for calculating the virtual side correction amount which is the correction amount for the virtual side; a microscopic sides correction amount calculation unit for calculating the correction amount for each of two or more microscopic sides included in the set of microscopic sides corresponding to the virtual side using the correction amount for the virtual side; and an output unit for outputting the correction amount for two or more microscopic sides.
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Inventors:
TSUNOE HIROYUKI (JP)
Application Number:
PCT/JP2015/069265
Publication Date:
April 28, 2016
Filing Date:
July 03, 2015
Export Citation:
Assignee:
NIPPON CONTROL SYS CORP (JP)
International Classes:
G03F1/78; G03F1/70; G03F7/20
Foreign References:
| JP2012042498A | 2012-03-01 | |||
| JP2004355644A | 2004-12-16 | |||
| JP2003309065A | 2003-10-31 | |||
| JPH0934097A | 1997-02-07 | |||
| JPH06110976A | 1994-04-22 | |||
| JPH04181715A | 1992-06-29 |
Other References:
See also references of EP 3211479A4
Attorney, Agent or Firm:
TANIGAWA, HIDEKAZU (JP)
Mountain stream English-Japanese (JP)
Mountain stream English-Japanese (JP)
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