Title:
PATTERN DIMENSION MEASUREMENT METHOD, PATTERN DIMENSION MEASUREMENT DEVICE, PROGRAM FOR CAUSING COMPUTER TO EXECUTE PATTERN DIMENSION MEASUREMENT METHOD, AND RECORDING MEDIUM HAVING SAME RECORDED THEREON
Document Type and Number:
WIPO Patent Application WO/2011/145338
Kind Code:
A1
Abstract:
Disclosed is a method for more precisely measuring the dimension of a pattern inclined with respect to the image of the pattern of an object to be inspected.
The method comprises: a step (S1001) for detecting the auxiliary dot sequence indicating the track of the pattern from the image of the pattern of the object to be inspected; a step (S1002) for calculating the approximate straight line of the auxiliary dot sequence; a step (S1003) for acquiring the signal waveform perpendicular to the approximate straight line; a step (S1004) for detecting the edge position by use of the signal waveform; and a step (S1005) for obtaining the dimension of the pattern from the edge position.
Inventors:
YAMADA, Shinya (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
山田 慎也 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
山田 慎也 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
Application Number:
JP2011/002748
Publication Date:
November 24, 2011
Filing Date:
May 18, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YAMADA, Shinya (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YAMADA, Shinya (HITACHI LTD., 292 Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
International Classes:
G01B15/04
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
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Claims: