PATTERN EVALUATION DEVICE AND VISUAL INSPECTION DEVICE COMPRISING PATTERN EVALUATION DEVICE

Title:

PATTERN EVALUATION DEVICE AND VISUAL INSPECTION DEVICE COMPRISING PATTERN EVALUATION DEVICE

Document Type and Number:

WIPO Patent Application WO/2014/119509

Kind Code:

A1

Abstract:

This pattern evaluation device comprises a model estimating unit to estimate, from an inspection image, a model resulting from a manufacturing method, a deformation estimating unit to estimate the deformation of the inspection image using the estimated model, a reference data deforming unit to deform reference data using the estimated deformation, and an evaluating unit to evaluate by comparing the reference data deformed by the reference data deforming unit and the inspection image.

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Inventors:

USHIBA HIROYUKI (JP)
MINAKAWA TSUYOSHI (JP)

Application Number:

PCT/JP2014/051661

Publication Date:

August 07, 2014

Filing Date:

January 27, 2014

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

G01N23/225; G01B11/24; G01B15/04; G01N21/956; G06T1/00; G06T7/00; H01L21/027; H01L21/66

Foreign References:

JP2012002663A	2012-01-05
JP2011043672A	2011-03-03
JP2009222626A	2009-10-01
JP2010537394A	2010-12-02
JP2013236031A	2013-11-21

Attorney, Agent or Firm:

HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)

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