Title:
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/070135
Kind Code:
A1
Abstract:
Provided is a pattern inspection method, wherein, when executing an inspecting of whether each of the patterns on measurement objects, which are conveyed continuously in a first direction and onto which the same pattern is patterned, is pass or fail, a search for an angle correction image that has the pattern thereof deviated for an angle equivalent to the amount of angle deviation of the pattern to be inspected is executed within a storage apparatus, which has stored therein a plurality of angle correction images that have the angles of the patterns thereof deviated at predetermined angles with respect to a direction towards which the angle correction images are supposed to be oriented, and the angle correction image that was found as a result of the search is compared to images of each of the patterns that have had position deviation thereof corrected.
Inventors:
KURODA TSUYOSHI (JP)
Application Number:
PCT/JP2010/071034
Publication Date:
May 31, 2012
Filing Date:
November 25, 2010
Export Citation:
Assignee:
NIRECO CORP (JP)
KURODA TSUYOSHI (JP)
KURODA TSUYOSHI (JP)
International Classes:
G06T1/00; G06T7/00
Foreign References:
| JPH10206134A | 1998-08-07 |
Attorney, Agent or Firm:
AMANO, HIROSHI (JP)
Hiroshi Amano (JP)
Hiroshi Amano (JP)
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Claims: