Title:
PATTERN INSPECTION METHOD AND DEVICE FOR SAME
Document Type and Number:
WIPO Patent Application WO/2011/096328
Kind Code:
A1
Abstract:
During optical inspection of patterned media for hard disk-use, in order to perform inspection of a pattern without being affected by film thickness variation or film quality variation of an underlying film, the disclosed pattern inspection device is constituted to be provided with a rotary table means on which a sample is placed in a rotatable manner; an illumination means for emitting an illumination light onto the sample; a spectroscopic detection means for splitting reflected light from a region that has been radiated with light from the illumination means and detecting thereof; an optical properties detection means for processing a reflected light detection signal from a region wherein a pattern of a substrate detected by splitting light at the spectroscopic detection means has not been formed in order to detect optical properties of a multilayer film, and processing the reflected light detection signal from a pattern including the multilayer film in order to detect optical properties of the reflected light from a pattern including the multilayer film; and a pattern inspection means for processing information of optical properties of the reflected light from a pattern including the multilayer film using information of the optical properties of the reflected light from the multilayer film that have been detected at the optical properties detection means, and thereby inspecting a pattern formed upon the multilayer film.
Inventors:
SASAZAWA Hideaki (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
笹澤 秀明 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HIROSE Takenori (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
廣瀬 丈師 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
笹澤 秀明 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HIROSE Takenori (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
廣瀬 丈師 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
Application Number:
JP2011/051632
Publication Date:
August 11, 2011
Filing Date:
January 27, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SASAZAWA Hideaki (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
笹澤 秀明 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HIROSE Takenori (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SASAZAWA Hideaki (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
笹澤 秀明 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
HIROSE Takenori (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
International Classes:
G11B5/84; G01B11/24; G01N21/95
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
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