Title:
PATTERN OBSERVATION DEVICE, RECIPE PRODUCTION DEVICE, AND RECIPE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/101695
Kind Code:
A1
Abstract:
The present invention efficiently produces a recipe needed for capturing an image of a review device or the like, in order to identify a cause of a fault location on the basis of a result from a fault analysis system. A pattern observation device, or a recipe production device connected to the pattern observation device, is characterized in having a recipe production unit for setting an image-capturing condition such that an image is captured along wiring that includes a fault location, on the basis of wiring information including the fault location, as inputted from a fault analysis system connected to the pattern observation device via a network.
Inventors:
SAKAI, Tsunehiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
堺 恒弘 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
堺 恒弘 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/006249
Publication Date:
August 02, 2012
Filing Date:
November 09, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SAKAI, Tsunehiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SAKAI, Tsunehiro (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01L21/66; G01N23/225
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
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Claims:
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