Title:
PATTERN SHAPE SELECTION METHOD AND PATTERN MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/013316
Kind Code:
A1
Abstract:
Proposed are a pattern shape selection method and a pattern measuring device whereby it is possible to appropriately estimate the shape on the basis of comparison between actual waveforms and library data. As an illustrative embodiment of the above, there are proposed a method and a device whereby a library is referred to with respect to waveforms obtained, thereby selecting the shape of a pattern. The aforementioned method and device are such that waveform information is obtained under a plurality of waveform acquisition conditions on the basis of irradiation of specimens with charged particle beams, and that with respect to the resulting plurality of pieces of waveform information, reference is made to a library wherein there is memorized waveform information obtained under different waveform acquisition conditions for a plurality of pattern shapes, and that thereby a pattern shape memorized in the aforementioned library is selected.
Inventors:
TANAKA, Maki (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
田中麻紀 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
SHISHIDO, Chie (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
宍戸千絵 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社 日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
田中麻紀 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
SHISHIDO, Chie (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
宍戸千絵 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社 日立製作所 生産技術研究所内 Kanagawa, 〒2440817, JP)
Application Number:
JP2010/004587
Publication Date:
February 03, 2011
Filing Date:
July 15, 2010
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
TANAKA, Maki (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
田中麻紀 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
SHISHIDO, Chie (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
TANAKA, Maki (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
田中麻紀 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
SHISHIDO, Chie (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
International Classes:
G01B15/04; G01N23/225; H01L21/66
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
Download PDF: