Title:
PATTERNED MEDIA DEFECT INSPECTOR DEVICE AND INSPECTION METHOD FOR STAMPER FOR PATTERNED MEDIA EMPLOYING SAME
Document Type and Number:
WIPO Patent Application WO/2011/122096
Kind Code:
A1
Abstract:
Disclosed is a method for inspection for a stamper for patterned media, which detects problems with a stamper for transferring a finely detailed pattern to photoresist coated upon a sample, in order to classify defects occurring repeatedly in patterned media discs into defects arising from deteriorations from changes over time in the stamper and defects arising from process problems, and to detect defects arising from changes over time in the stamper. The finely detailed pattern of the stamper is transferred upon the photoresist film coated upon the obverse face of the sample, and light is projected thereupon. The reflected light from the sample whereupon the light is projected is spectrally detected, defects are extracted from a detection waveform obtained by the spectral detection, and a discrimination is made, concerning defects occurring in the same location upon a plurality of samples from among the extracted defects, between the defects caused by the stamper and the defects caused by the process of forming the photoresist film pattern. When the number of defects caused by the stamper exceeds a preset number, an alert is issued.
Inventors:
HORIE Kiyotaka (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
堀江 聖岳 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
KUSAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
日下 優 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
堀江 聖岳 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
KUSAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
日下 優 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
Application Number:
JP2011/052051
Publication Date:
October 06, 2011
Filing Date:
February 01, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
HORIE Kiyotaka (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
堀江 聖岳 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
KUSAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
HORIE Kiyotaka (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
堀江 聖岳 (〒95 埼玉県児玉郡上里町嘉美１６００番地 株式会社日立ハイテクノロジーズ 埼玉事業所内 Saitama, 〒3690395, JP)
KUSAKA Yu (HITACHI HIGH-TECHNOLOGIES CORPORATION 1600 Kami, Kamisato-machi, Kodama-gu, Saitama 95, 〒3690395, JP)
International Classes:
G11B5/84; G01N21/95
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
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