Title:
PATTERNING OF THIN FILM CONDUCTIVE AND PASSIVATION LAYERS
Document Type and Number:
WIPO Patent Application WO/2011/005887
Kind Code:
A3
Abstract:
Simplified patterning of conductive layers and passivation layers of a thin film is disclosed. In some embodiments, the patterning can include depositing a conductive layer onto a thin film substrate, depositing a passivation layer onto the conductive layer, applying a removable mask including a desired pattern to the passivation layer, patterning the passivation layer to have the desired pattern, using the patterned passivation layer as a mask for the conductive layer, and patterning the conductive layer to have the desired pattern. In other embodiments, the patterning can include depositing a conductive layer onto a thin film substrate, depositing a passivation layer onto the conductive layer, depositing a protective layer onto the passivation layer, applying a removable mask including a desired pattern to the protective layer, patterning the protective layer to have the desired pattern, using the patterned protective layer as a mask for the passivation and conductive layers, and patterning the passivation and conductive layers to have the desired pattern. An exemplary device utilizing the thin film so patterned can include a touch sensor panel.
Inventors:
KANG SUNGGU (US)
HUANG LILI (US)
HUANG LILI (US)
Application Number:
PCT/US2010/041251
Publication Date:
August 11, 2011
Filing Date:
July 07, 2010
Export Citation:
Assignee:
APPLE INC (US)
KANG SUNGGU (US)
HUANG LILI (US)
KANG SUNGGU (US)
HUANG LILI (US)
International Classes:
G06F3/041
Foreign References:
| US6682961B1 | 2004-01-27 | |||
| US20060097991A1 | 2006-05-11 |
Attorney, Agent or Firm:
KUBOTA, Glenn, M. et al. (555 West Fifth StreetLos Angeles, CA, US)
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