Title:
PEELING SYSTEM, PEELING METHOD, AND COMPUTER STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2012/093610
Kind Code:
A1
Abstract:
This peeling system has: a loading/unloading station that loads/unloads substrates to be processed, support substrates, or stacked substrates in which these are made to adhere; a peeling processing station that carries out prescribed processing on substrates to be processed, support substrates and stacked substrates; and a transport station provided between the loading/unloading station and the peeling processing station. The peeling processing station has a peeling apparatus that peels the stacked substrates, a first washing apparatus that washes peeled substrates to be processed, and a second washing apparatus that washes the peeled support substrates. The pressure inside the transport station is a positive pressure in relation to the pressure inside the peeling apparatus, the pressure inside the first washing apparatus, and the pressure inside the second washing apparatus. The pressure inside a transport apparatus is a positive pressure in relation to the pressure inside the peeling apparatus and the pressure inside the first washing apparatus.
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Inventors:
YOSHITAKA, Naoto (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
吉高 直人 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
IWASHITA, Yasuharu (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
吉高 直人 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
IWASHITA, Yasuharu (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2011/080048
Publication Date:
July 12, 2012
Filing Date:
December 26, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
YOSHITAKA, Naoto (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
吉高 直人 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
YOSHITAKA, Naoto (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
吉高 直人 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
International Classes:
H01L21/02; H01L21/304; H01L21/677; H01L21/683; H01L27/12
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (Hazuki International, Kakubari Building 1-20, Sumiyoshi-cho, Shinjuku-k, Tokyo 65, 〒1620065, JP)
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Claims:
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