PELLICLE FRAME AND PELLICLE - NIPPON LIGHT METAL CO

Title:

PELLICLE FRAME AND PELLICLE

Document Type and Number:

WIPO Patent Application WO/2018/012324

Kind Code:

A1

Abstract:

A pellicle frame (2) which can effectively suppress deformation of an exposure master plate (8) caused by adhesion of the pellicle (1), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided. This pellicle frame is provided with an anodic oxidation coating on the surface of an aluminum alloy frame, and is characterized in that the aluminum alloy frame contains Ca: 5.0-10.0 wt% with the remainder aluminum and unavoidable impurities, the area (volume) ratio of the Al4Ca phase, which is a dispersed phase, is greater than or equal to 25%, the crystal structure of part of the Al4Ca phase is formed from an aluminum alloy which is monoclinic, and the anodic oxidation coating has Al4Ca particles.

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Inventors:

TAGUCHI YOSHIHIRO (JP)
YAMAGUCHI TAKAYUKI (JP)
YU JUN (JP)
ISHIWATA YASUO (JP)

Application Number:

PCT/JP2017/024177

Publication Date:

January 18, 2018

Filing Date:

June 30, 2017

Export Citation:

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Assignee:

NIPPON LIGHT METAL CO (JP)

International Classes:

G03F1/64; C22C21/00; C22F1/04; C25D11/04; C25D11/06; C25D11/22; C22F1/00

Domestic Patent References:

WO2015059783A1

2015-04-30

Foreign References:

JP2011007934A

2011-01-13

Other References: