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Title:
PELLICLE INCLUDING GRAPHITE FILM
Document Type and Number:
WIPO Patent Application WO/2019/172170
Kind Code:
A1
Abstract:
A conventional pellicle has a problem in maintaining a higher transmittance for extreme ultraviolet (EUV) light while making the EUV transmittance uniform. The present invention provides a pellicle capable of maintaining a higher transmittance and uniformity in EUV transmittance using a graphite film as the pellicle, the graphite film having a thickness of 5 nm to 30 nm and a surface roughness (Sa) of 0.1 nm to 500 nm.

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Inventors:
KAWASHIMA YUKI (JP)
OZAKI SHUHEI (JP)
TACHIBANA MASAMITSU (JP)
WATANABE TAKEO (JP)
HARADA TETSUO (JP)
Application Number:
PCT/JP2019/008330
Publication Date:
September 12, 2019
Filing Date:
March 04, 2019
Export Citation:
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Assignee:
KANEKA CORP (JP)
UNIV HYOGO (JP)
International Classes:
G03F1/62; G03F7/20
Domestic Patent References:
WO2014188710A12014-11-27
WO2015178250A12015-11-26
WO2015166927A12015-11-05
Foreign References:
US20180004082A12018-01-04
US20170205705A12017-07-20
JP2013534727A2013-09-05
JP2018043100A2018-03-22
Other References:
K. NAGASHIO ET AL., J. APPL. PHYS., vol. 49, 2010, pages 051304
Y. ZHANG ET AL., APPL. PHYS. LETT., vol. 86, 2005, pages 073104
"The Chemical Society of Japan", 5 June 1991, MARUZEN CO., LTD., pages: 170
See also references of EP 3764160A4
Attorney, Agent or Firm:
USFI PATENT ATTORNEYS INTERNATIONAL OFFICE (JP)
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