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Title:
PELLICLE AND MASK ADHESIVE AGENT FOR USE IN SAME
Document Type and Number:
WIPO Patent Application WO/2012/004951
Kind Code:
A1
Abstract:
The purpose is to provide a pellicle which has a mask adhesive layer that can be plastic-deformed readily particularly at a temperature at which exposure to light is carried out, rarely remains an adhesive agent upon the removal of the mask adhesive layer from a mask and has good handling properties, and which can prevent the position gap of a pattern. For achieving the purpose, a pellicle (10) is provided, which comprises a pellicle frame (14), a pellicle film (12) and a mask adhesive layer (15) containing a mask adhesive agent. The mask adhesive agent comprises 100 parts by mass of a thermoplastic elastomer (A) having a tanδ peak temperature of -20 to 30°C and 20 to 150 parts by mass of an adhesiveness-imparting resin (B), wherein the thermoplastic elastomer (A) is at least one component selected from the group consisting of a styrene thermoplastic elastomer, a (meth)acrylic acid ester thermoplastic elastomer and an olefin thermoplastic elastomer, and the mask adhesive agent has a tanδ peak temperature of -10 to 30°C.

Inventors:
TANEICHI, Daiki (())
種市 大樹 (())
KOZEKI, Takashi (())
Application Number:
JP2011/003706
Publication Date:
January 12, 2012
Filing Date:
June 29, 2011
Export Citation:
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Assignee:
Mitsui Chemicals, Inc. (5-2 Higashi-Shimbashi 1-chome, Minato-ku Tokyo, 17, 〒1057117, JP)
三井化学株式会社 (〒17 東京都港区東新橋1丁目5番2号 Tokyo, 〒1057117, JP)
TANEICHI, Daiki (())
種市 大樹 (())
International Classes:
C09J133/00; C09J153/00
Domestic Patent References:
2010-10-14
Foreign References:
JPH04237056A1992-08-25
JPH10282640A1998-10-23
JP2007156397A2007-06-21
JP2008174727A2008-07-31
JP2003202660A2003-07-18
JP2008065258A2008-03-21
JPH08151557A1996-06-11
JP2008159701A2008-07-10
JP2009012464A2009-01-22
JP2000267261A2000-09-29
JPH04237056A1992-08-25
JPH11323072A1999-11-26
JP2008103718A2008-05-01
JP2008103719A2008-05-01
Other References:
See also references of EP 2592123A1
Attorney, Agent or Firm:
WASHIDA, Kimihito (8th Floor, Shinjuku First West Bldg. 1-23-7, Nishi-Shinjuku, Shinjuku-k, Tokyo 23, 〒1600023, JP)
Download PDF:
Claims:



 
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