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Title:
PELLICLE AND MASK ADHESIVE AGENT FOR USE IN SAME
Document Type and Number:
WIPO Patent Application WO/2012/004951
Kind Code:
A1
Abstract:
The purpose is to provide a pellicle which has a mask adhesive layer that can be plastic-deformed readily particularly at a temperature at which exposure to light is carried out, rarely remains an adhesive agent upon the removal of the mask adhesive layer from a mask and has good handling properties, and which can prevent the position gap of a pattern. For achieving the purpose, a pellicle (10) is provided, which comprises a pellicle frame (14), a pellicle film (12) and a mask adhesive layer (15) containing a mask adhesive agent. The mask adhesive agent comprises 100 parts by mass of a thermoplastic elastomer (A) having a tanδ peak temperature of -20 to 30°C and 20 to 150 parts by mass of an adhesiveness-imparting resin (B), wherein the thermoplastic elastomer (A) is at least one component selected from the group consisting of a styrene thermoplastic elastomer, a (meth)acrylic acid ester thermoplastic elastomer and an olefin thermoplastic elastomer, and the mask adhesive agent has a tanδ peak temperature of -10 to 30°C.

Inventors:
TANEICHI, Daiki (())
種市 大樹 (())
KOZEKI, Takashi (())
Application Number:
JP2011/003706
Publication Date:
January 12, 2012
Filing Date:
June 29, 2011
Export Citation:
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Assignee:
Mitsui Chemicals, Inc. (5-2 Higashi-Shimbashi 1-chome, Minato-ku Tokyo, 17, 〒1057117, JP)
三井化学株式会社 (〒17 東京都港区東新橋1丁目5番2号 Tokyo, 〒1057117, JP)
TANEICHI, Daiki (())
種市 大樹 (())
International Classes:
C09J133/00; C09J153/00
Attorney, Agent or Firm:
WASHIDA, Kimihito (8th Floor, Shinjuku First West Bldg. 1-23-7, Nishi-Shinjuku, Shinjuku-k, Tokyo 23, 〒1600023, JP)
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Claims:



 
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