PELLICLE AND NOVEL FLUORINATED POLYMER

Title:

PELLICLE AND NOVEL FLUORINATED POLYMER

Document Type and Number:

WIPO Patent Application WO/2005/054336

Kind Code:

A1

Abstract:

A useful fluorinated polymer as a material for pellicle or the like, which exhibits high durability and transparency to short-wavelength light (ArF excimer laser of 193 nm oscillation wavelength or F2 excimer laser of 157 nm oscillation wavelength). There is provided a pellicle wherein the polymer (I) for use in pellicle film and/or adhesive therefor consists of one essentially having the following unit (1). The unit (1) is one wherein a fluorinated chain constituting a polymer main chain consists of carbon atoms and ether oxygen atoms, and wherein at least one of the main chain constituting carbon atoms is one constituting a cyclic group while at least one of the main chain constituting ether oxygen atoms is one not constituting a cyclic group. For example, the unit (1) is one of the following formula (A1): (A1) (wherein n is 1 or 2; R^F1 is -F or -CF₃; and R^F2 is -F or a C₁-C₅ perfluoroalkyl).

Inventors:

MATSUKURA IKUO (JP)
YAMAMOTO HIROMASA (JP)
ISHIBASHI YUICHIRO (JP)
OKADA SHINJI (JP)
SHIROTA NAOKO (JP)

Application Number:

PCT/JP2004/017965

Publication Date:

June 16, 2005

Filing Date:

December 02, 2004

Export Citation:

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Assignee:

ASAHI GLASS CO LTD (JP)
MATSUKURA IKUO (JP)
YAMAMOTO HIROMASA (JP)
ISHIBASHI YUICHIRO (JP)
OKADA SHINJI (JP)
SHIROTA NAOKO (JP)

International Classes:

C07D307/32; C07D493/04; C08G65/00; C08G65/22; C08G67/00; C09J7/02; C09J173/00; G03F1/62; H01L21/027; G03F7/004; (IPC1-7): C08G67/00; G03F1/14; C09J173/00; C09J7/02

Domestic Patent References:

WO2002018314A1	2002-03-07
WO2002048085A1	2002-06-20
WO2004088422A1	2004-10-14
WO2002093261A1	2002-11-21

Foreign References:

JPH11209685A	1999-08-03
JP2001330943A	2001-11-30

Other References: