Title:
PELLICLE, AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/193681
Kind Code:
A1
Abstract:
The purpose of the present disclosure is to provide a pellicle that has an adhesive layer having good flatness, and a method for producing the pellicle with good reproducibility. Said purpose is achieved by a pellicle having: a pellicle frame; a pellicle film provided so as to be stretched on one end surface of the pellicle frame; and an adhesive layer provided on the other end surface of the pellicle frame. The adhesive layer contains a cured product of a resin composition containing a curable polymer (A), and a curing agent (B1) and a curing agent (B2). The curing agent (B1) and the curing agent (B2) have different curing conditions.
Inventors:
SATOH YASUSHI
KOHMURA KAZUO
ISHIKAWA AKIRA
UNEZAKI TAKASHI
ISHIKAWA HISAKO
KOZEKI TAKASHI
ITO KEN
KOHMURA KAZUO
ISHIKAWA AKIRA
UNEZAKI TAKASHI
ISHIKAWA HISAKO
KOZEKI TAKASHI
ITO KEN
Application Number:
PCT/JP2021/012118
Publication Date:
September 30, 2021
Filing Date:
March 24, 2021
Export Citation:
Assignee:
MITSUI CHEMICALS INC (JP)
International Classes:
G03F1/62; G03F7/20
Foreign References:
| JP2012093518A | 2012-05-17 | |||
| JP2006335840A | 2006-12-14 | |||
| JP2016173414A | 2016-09-29 | |||
| JP2018021182A | 2018-02-08 |
Attorney, Agent or Firm:
WASHIDA & ASSOCIATES (JP)
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