Title:
PELLICLE STORING CONTAINER
Document Type and Number:
WIPO Patent Application WO/2007/043217
Kind Code:
A1
Abstract:
A pellicle storing container capable of reducing of abrasion powder. There is provided
pellicle storing container (1) for transporting of pellicle (5), comprising pellicle
membrane (6) and, supporting the pellicle membrane (6), support frame (7), which
pellicle storing container (1) is equipped with tray (3), cover (2) as a lid thereof
and block members (4,50,60,70) for closing up any gap between the tray (3) and
the cover (2) on the outer side or inner side of the tray (3) and cover (2). The block
members (4,50,60,70) can be seal member (79), clip (4), composite clip (50) and
cover sheet (60). The occurrence/penetration of abrasion powder can be reduced
by constituting al least a part brought into contact with the tray (3) or cover
(2) by a urethane elastomer.
Inventors:
KIKUCHI WATARU (JP)
YAJIMA TOSHITSUGU (JP)
YAJIMA TOSHITSUGU (JP)
Application Number:
PCT/JP2006/312795
Publication Date:
April 19, 2007
Filing Date:
June 27, 2006
Export Citation:
Assignee:
SHINETSU POLYMER CO (JP)
KIKUCHI WATARU (JP)
YAJIMA TOSHITSUGU (JP)
KIKUCHI WATARU (JP)
YAJIMA TOSHITSUGU (JP)
International Classes:
B65D45/16; B65D53/00; B65D77/20; B65D85/38; G03F1/62; H01L21/027
Foreign References:
| JPH08172038A | 1996-07-02 | |||
| JP2003165819A | 2003-06-10 | |||
| JPH06288477A | 1994-10-11 | |||
| JP2000258897A | 2000-09-22 | |||
| JP2005002171A | 2005-01-06 | |||
| JP2005225949A | 2005-08-25 | |||
| JP2004123216A | 2004-04-22 |
Attorney, Agent or Firm:
IAT WORLD PATENT LAW FIRM (Shinjuku Square Tower 22-1, Nishi-shinjuku 6-chom, Shinjuku-ku Tokyo 27, JP)
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