Title:
PELLICLE
Document Type and Number:
WIPO Patent Application WO/2023/145604
Kind Code:
A1
Abstract:
Provided is a pellicle in which the membrane stress in the pellicle film is adjusted to be suitable, distortion due to turbulent flow, etc., is kept under control, and the structural stability is excellent. A pellicle (1) is provided with a rectangular frame (2), a pellicle film (3) provided to one surface of the frame (2), and a mask adhesive (4) provided to the other surface of the frame (2). The length of the longer side of the frame (2) is 600 mm or greater and the length of the shorter side is 500 mm or greater. The pellicle is characterized in that when a predetermined air-blast flutter experiment is carried out, the sum of displacement (T1) in a first direction and displacement (T2) in a second direction (Δ displacement = T1 + T2) is between 1.50 mm and 2.80 mm, and the greater of a maximum displacement (T1max) in the first direction and a maximum displacement (T2max) in the second direction (flutter amounts) is between 1.00 mm and 2.40 mm.
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Inventors:
HIRANO MASAKATSU (JP)
TANAKA TOMOKAZU (JP)
TANAKA TOMOKAZU (JP)
Application Number:
PCT/JP2023/001530
Publication Date:
August 03, 2023
Filing Date:
January 19, 2023
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
International Classes:
G03F1/62
Foreign References:
| JPH11160855A | 1999-06-18 | |||
| JPH10339944A | 1998-12-22 | |||
| JP2019066848A | 2019-04-25 | |||
| JP2004296829A | 2004-10-21 | |||
| JP2005134683A | 2005-05-26 | |||
| JP2004343102A | 2004-12-02 | |||
| JP2020091314A | 2020-06-11 | |||
| JP2005148287A | 2005-06-09 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
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