Title:
PENDULUM SENSOR UNIT, SUBSTRATE DETECTION DEVICE, AND SUBSTRATE CONVEYANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/020614
Kind Code:
A1
Abstract:
Provided are a pendulum sensor unit, substrate detection device, and substrate conveyance device capable of reducing swinging time. A pendulum sensor unit is provided with a pillar-shaped pendulum body, two support shafts that protrude from the outer peripheral surface of the pendulum body along the same axis, a support base that supports the pendulum body such that the same is capable of swinging about the support shafts, and a sensor that detects the swinging of the pendulum body and is disposed so as to oppose the outer peripheral surface in the direction of the protrusion of one of the two support shafts in a state where the pendulum body is supported in the vertical direction by the support base.
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Inventors:
TAKAGI TOSHIHIDE (JP)
NONAKA KENICHI (JP)
NONAKA KENICHI (JP)
Application Number:
PCT/JP2016/072037
Publication Date:
February 01, 2018
Filing Date:
July 27, 2016
Export Citation:
Assignee:
SAKAI DISPLAY PRODUCTS CORP (JP)
International Classes:
G01V9/00; H01H36/00
Foreign References:
| JP2010133884A | 2010-06-17 | |||
| US20150300801A1 | 2015-10-22 | |||
| JPH07114623A | 1995-05-02 |
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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