Title:
PERIPHERAL EDGE PROCESSING DEVICE, PERIPHERAL EDGE PROCESSING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2022/054528
Kind Code:
A1
Abstract:
The present disclosure describes a peripheral edge processing device, a peripheral edge processing method, and a computer-readable recording medium which can accurately process a peripheral edge portion of a film. The peripheral edge processing device comprises: an image capturing unit which is configured to acquire captured images by capturing images of peripheral edge portions of substrates, the substrates including a reference substrate and a processing substrate; a first calculation unit which is configured to calculate, on the basis of the center of the reference substrate, a theoretical position of a peripheral edge of the reference substrate in the captured image of the reference substrate; a second calculation unit which is configured to calculate, on the basis of the theoretical position of the peripheral edge of the reference substrate and the captured image of the processing substrate, a theoretical position of a peripheral edge of the processing substrate in the captured image of the processing substrate; a setting unit which is configured to set, on the basis of the theoretical position of the peripheral edge of the processing substrate, processing parameters of peripheral edge portions of the substrates; and a processing unit which is configured to process the peripheral edge portions of the substrates on the basis of the processing parameters.
Inventors:
ENOMOTO MASASHI (JP)
KASHIWAGI HIDEAKI (JP)
NAKAMURA NAOTO (JP)
KASHIWAGI HIDEAKI (JP)
NAKAMURA NAOTO (JP)
Application Number:
PCT/JP2021/030440
Publication Date:
March 17, 2022
Filing Date:
August 19, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01B11/00; G03F7/20; H01L21/027
Foreign References:
| JP2019212804A | 2019-12-12 | |||
| JP2019068001A | 2019-04-25 | |||
| JP2003282427A | 2003-10-03 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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