Title:
PERMEABILITY EVALUATION METHOD
Document Type and Number:
WIPO Patent Application WO/2015/159367
Kind Code:
A1
Abstract:
A permeability evaluation method for evaluating the permeability of a test piece with respect to heavy-metal ions. Said permeability evaluation method includes a step in which, with a first liquid that contains heavy-metal ions and a second liquid that contains water and an organic solvent separated by the test piece, a voltage is applied between a positive electrode provided on the first-liquid side and a negative electrode provided on the second-liquid side and the amount of current flowing between said electrodes is measured. The test piece contains an insulating material used in semiconductor manufacturing, and the concentration of heavy-metal ions in the first liquid is at least 0.5 mg/kg.
Inventors:
SUZUMURA KOJI (JP)
YAMAMOTO KAZUHIRO (JP)
MURAHASHI TOMOKO (JP)
YAMAMOTO KAZUHIRO (JP)
MURAHASHI TOMOKO (JP)
Application Number:
PCT/JP2014/060726
Publication Date:
October 22, 2015
Filing Date:
April 15, 2014
Export Citation:
Assignee:
HITACHI CHEMICAL CO LTD (JP)
International Classes:
G01N27/06; C09J7/00
Foreign References:
| JP2000040726A | 2000-02-08 | |||
| JPS61226637A | 1986-10-08 | |||
| JP2009541754A | 2009-11-26 | |||
| JP2011222779A | 2011-11-04 | |||
| JPH03248039A | 1991-11-06 | |||
| JPH05326661A | 1993-12-10 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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