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Patent Searching and Data


Title:
PEROVSKITE THIN FILM POST-TREATMENT APPARATUS, USING METHOD, AND APPLICATION
Document Type and Number:
WIPO Patent Application WO/2018/219153
Kind Code:
A1
Abstract:
The present invention relates to a perovskite thin film post-treatment apparatus, comprising a solution spray coating and cleaning part and/or a solvent deposition part. The solution spray coating and cleaning part comprises a first conveying device, a first closed chamber, a solution spray coating device, a high pressure gas nozzle device, and a high temperature drying device; the high pressure gas nozzle device is disposed between the solution spray coating device and the high temperature drying device; the first conveying device stretches across the first closed chamber. The solvent deposition part comprises a drive shaft device, a second closed chamber, a heating device, and a solvent evaporation device; the solvent evaporation device is close to the solution spray coating and cleaning part; a drive shaft of the drive shaft device passes between the heating device and the solvent evaporation device which are disposed in a vertical direction. The present invention also relates to a using method for and an application of a perovskite thin film post-treatment apparatus. The present invention is used for performing subsequent cleaning and annealing on a substrate on which a perovskite thin film is manufactured, and repairing defects of the perovskite thin film, thereby further improving the quality of the perovskite thin film.

Inventors:
YAO, Jizhong (Building B, Room 209No. 7 Longtan Road, Yuhang Distric, Hangzhou Zhejiang 1, 311121, CN)
YAN, Buyi (Building B, Room 209No. 7 Longtan Road, Yuhang Distric, Hangzhou Zhejiang 1, 311121, CN)
Application Number:
CN2018/087354
Publication Date:
December 06, 2018
Filing Date:
May 17, 2018
Export Citation:
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Assignee:
HANGZHOU MICROQUANTA SEMICONDUCTOR CORPORATION LIMITED (Building B, Room 209No. 7 Longtan Road, Yuhang Distric, Hangzhou Zhejiang 1, 311121, CN)
International Classes:
H01L51/42
Foreign References:
CN207009480U2018-02-13
CN1947227A2007-04-11
CN101399182A2009-04-01
CN104911705A2015-09-16
CN105957970A2016-09-21
US20100155647A12010-06-24
Other References:
GAO, CHENG: "Study . of . High . Performance . Perovskite Solar Cell", SCIENCE -ENGINEERING (B), CHINA MASTER'S THESES FULL-TEXT DATABASE, 15 February 2017 (2017-02-15), pages 28 - 32
Attorney, Agent or Firm:
HANGZHOU AOCHUANG INTELLECTUAL PROPERTY AGENCY CO., LTD (Room 128, No. 439 Fuxing Road Xiacheng Distric, Hangzhou Zhejiang 8, 310008, CN)
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