Title:
PHASE-DIFFERENCE SCANNING TRANSMISSION ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2017/170554
Kind Code:
A1
Abstract:
[Problem] To provide a phase-difference scanning transmission electron microscope that has excellent operatability and that is capable of imaging the phase change of a sample with desired contrast while minimizing the electron beam exposure of the sample. [Solution] This phase-difference scanning transmission electron microscope is provided with: an electron gun 31; an irradiation optical system 32; a scan coil 33; a convergence optical system 34; an objective lens 35; and a bright field detector 36 that detects the intensity of an electron beam. A Fresnel zone plate 40 is arranged on the upstream side of a STEM focal plane such that the focus thereof is set on the STEM focal plane. Thus, electron beams including a reference wave and a main probe wave from the plate irradiate a sample object 50 placed between the convergence optical system 34 and the objective lens 35.
More Like This:
Inventors:
NAGATANI YUKINORI (JP)
Application Number:
PCT/JP2017/012647
Publication Date:
October 05, 2017
Filing Date:
March 28, 2017
Export Citation:
Assignee:
INTER-UNIVERSITY RES INST CORP NAT INSTS OF NATURAL SCIENCES (JP)
International Classes:
H01J37/295; H01J37/28
Foreign References:
| JP2006164861A | 2006-06-22 | |||
| JP2014049444A | 2014-03-17 |
Attorney, Agent or Firm:
SASAKI Ko (JP)
Download PDF: