Title:
PHASE GRATING AND ITS MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/1998/025167
Kind Code:
A1
Abstract:
A phase grating which has a trapezoidal waveform cross section on its grating face side, has a trapezoid factor (B/A) of the trapezoidal waveform, is 0.006 $m(F)B/A<1 (where A is the difference in area between 'a perfect trapezoid' circumscribing the trapezoidal waveform and 'a sinusoidal curve' inscribing 'the perfect trapezoid' and B is the difference in area between 'the perfect trapezoid' and 'the trapezoidal waveform'). The higher order diffracted light components of a conventional phase grating having a trapezoidal cross section are reduced and the decline of the MTF in a low space frequency region is reduced.
Inventors:
SHOUJI MASUHIRO (JP)
ICHIKAWA YUKIO (JP)
KATONO HIROKI (JP)
OGIHARA TAKEO (JP)
ICHIKAWA YUKIO (JP)
KATONO HIROKI (JP)
OGIHARA TAKEO (JP)
Application Number:
PCT/JP1997/004419
Publication Date:
June 11, 1998
Filing Date:
December 03, 1997
Export Citation:
Assignee:
KUREHA CHEMICAL IND CO LTD (JP)
SHOUJI MASUHIRO (JP)
ICHIKAWA YUKIO (JP)
KATONO HIROKI (JP)
OGIHARA TAKEO (JP)
SHOUJI MASUHIRO (JP)
ICHIKAWA YUKIO (JP)
KATONO HIROKI (JP)
OGIHARA TAKEO (JP)
International Classes:
G02B5/18; G02B27/46; (IPC1-7): G02B5/18; G02B27/46
Foreign References:
| JPH04297567A | 1992-10-21 | |||
| JPS53119063A | 1978-10-18 | |||
| JPS5789721A | 1982-06-04 | |||
| JPS63161425A | 1988-07-05 | |||
| JPH02132413A | 1990-05-21 | |||
| JPH0659218A | 1994-03-04 | |||
| JPH0566370A | 1993-03-19 | |||
| JPH08304615A | 1996-11-22 | |||
| JPH06118228A | 1994-04-28 | |||
| JPH0875919A | 1996-03-22 | |||
| JPH09263932A | 1997-10-07 | |||
| JPS5916435B2 | 1984-04-16 |
Other References:
See also references of EP 1014116A4
Attorney, Agent or Firm:
Hasegawa, Yoshiki (6F. Kyobashi National Building, 13-10,
Kyobashi 2-chom, Chuo-ku Tokyo 104, JP)
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