Title:
PHASE IMAGE ACQUISITION DEVICE AND PHASE IMAGE ACQUISITION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/138685
Kind Code:
A1
Abstract:
In the present invention, an interference image acquisition unit 2 acquires M interference images of an object in a state where the optical-path-length difference between the two beams of a two-beam interferometer 20 fluctuates over time. A calculation unit 3 estimates, for each of the M interference images, the overall offset phase shift amount of the image, establishes a group of N interference images from among the M interference images that have different offset phase shift amounts, and generates a phase image on the basis of the N interference images included in the group. As a result, a device and method are achieved that make it possible to acquire a phase image of an object even in a state where the optical-path-length difference between the two beams of a two-beam interferometer fluctuates over time.
Inventors:
YAMAUCHI TOYOHIKO (JP)
FUKAMI TADASHI (JP)
YAMADA HIDENAO (JP)
YASUHIKO OSAMU (JP)
FUKAMI TADASHI (JP)
YAMADA HIDENAO (JP)
YASUHIKO OSAMU (JP)
Application Number:
PCT/JP2018/042176
Publication Date:
July 18, 2019
Filing Date:
November 14, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01B9/02
Foreign References:
| JP2006200998A | 2006-08-03 | |||
| JP2014106222A | 2014-06-09 | |||
| US20100189372A1 | 2010-07-29 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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