Title:
PHOSPHOR CRYSTAL FILM AND PROCESS FOR MAKING SAME
Document Type and Number:
WIPO Patent Application WO/2011/004601
Kind Code:
A1
Abstract:
Provided is a phosphor crystal film having high brightness, which is obtained by enhancing the crystallinity of a film that consists of aluminum nitride doped with rare earth metal ions at a high content level, and protecting the luminescence intensity thereof from deterioration caused by concentration quenching. More specifically, the phosphor crystal film can be obtained by a process which comprises sputtering aluminum and a rare earth metal in a nitrogen atmosphere to grow a phosphor crystal doped with rare earth metal ions, said process including: preparing such a metal target that the content of a rare earth metal in aluminum nitride can fall within the range of 0.1 to 6% by mole; and conducting the sputtering while controlling the substrate temperature at a prescribed low temperature and while removing water from the residual gas in the vacuum chamber used in the sputtering. Phosphor crystal films have been made at temperatures falling within the range of 100°C or higher but below 300°C. As a result, it has been found that the lower the substrate temperature is, the higher the luminescence intensity is.
Inventors:
KITA, Takashi (1-1 Rokkodai-cho, Nada-ku, Kobe-sh, Hyogo 01, 〒6578501, JP)
喜多隆 (〒01 兵庫県神戸市灘区六甲台町１番１号 国立大学法人神戸大学内 Hyogo, 〒6578501, JP)
CHIGI, Yoshitaka (400 Itota, Yumesaki-Cho, Himejish, Hyogo 14, 〒6712114, JP)
喜多隆 (〒01 兵庫県神戸市灘区六甲台町１番１号 国立大学法人神戸大学内 Hyogo, 〒6578501, JP)
CHIGI, Yoshitaka (400 Itota, Yumesaki-Cho, Himejish, Hyogo 14, 〒6712114, JP)
Application Number:
JP2010/004445
Publication Date:
January 13, 2011
Filing Date:
July 07, 2010
Export Citation:
Assignee:
YUMEX INC. (400 Itota, Yumesaki-Cho Himeji-sh, Hyogo 14, 〒6712114, JP)
株式会社ユメックス (〒14 兵庫県姫路市夢前町糸田４００ Hyogo, 〒6712114, JP)
NATIONAL UNIVERSITY CORPORATION KOBE UNIVERSITY (1-1 Rokkodai-cho, Nada-ku Kobe-sh, Hyogo 01, 〒6578501, JP)
国立大学法人神戸大学 (〒01 兵庫県神戸市灘区六甲台町１番１号 Hyogo, 〒6578501, JP)
KITA, Takashi (1-1 Rokkodai-cho, Nada-ku, Kobe-sh, Hyogo 01, 〒6578501, JP)
株式会社ユメックス (〒14 兵庫県姫路市夢前町糸田４００ Hyogo, 〒6712114, JP)
NATIONAL UNIVERSITY CORPORATION KOBE UNIVERSITY (1-1 Rokkodai-cho, Nada-ku Kobe-sh, Hyogo 01, 〒6578501, JP)
国立大学法人神戸大学 (〒01 兵庫県神戸市灘区六甲台町１番１号 Hyogo, 〒6578501, JP)
KITA, Takashi (1-1 Rokkodai-cho, Nada-ku, Kobe-sh, Hyogo 01, 〒6578501, JP)
International Classes:
C09K11/64; C23C14/06; C23C14/34; C30B29/38; H01J63/04
Attorney, Agent or Firm:
THE PATENT CORPORATE BODY GLOBAL INTELLECTUAL PROPERTY (Floor 3, Shinmeikai Bldg. 4-banchi, Kaigandori, Chuo-ku, Kobe-sh, Hyogo 24, 〒6500024, JP)
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