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Title:
PHOTOCATALYTIC MULTILAYER METAL COMPOUND THIN FILM AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2011/024764
Kind Code:
A1
Abstract:
The purpose of the present invention is to quickly provide a photocatalytic titanium oxide thin film, which has high photocatalytic characteristics, at low temperatures at a low cost. Specifically disclosed is a photocatalytic titanium oxide thin film that is composed of a seed layer, which is composed of an amorphous metal compound thin film formed on the surface of a base such as a glass base or a plastic base, and a crystalline metal compound thin film that is grown on the seed layer in a columnar shape. The photocatalytic titanium oxide thin film is formed by a sputtering method at low temperatures at a high speed at a low cost, without carrying out a pretreatment or posttreatment using plasma of an active gas and without carrying out a heat treatment.

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Inventors:
NOGUCHI DAISUKE (JP)
KAWANO YOSHIHIKO (JP)
SEI FUMIHIRO (JP)
Application Number:
PCT/JP2010/064201
Publication Date:
March 03, 2011
Filing Date:
August 23, 2010
Export Citation:
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Assignee:
INST NAT COLLEGES TECH JAPAN (JP)
HONDA LOCK KK (JP)
CHINCRON CO LTD (JP)
NOGUCHI DAISUKE (JP)
KAWANO YOSHIHIKO (JP)
SEI FUMIHIRO (JP)
International Classes:
C23C14/34; B01D53/86; B01J21/06; B01J35/02; C01G23/04
Domestic Patent References:
WO2008056852A12008-05-15
Foreign References:
JP2003311157A2003-11-05
JP2000143300A2000-05-23
JPH11130434A1999-05-18
JP2007314835A2007-12-06
Other References:
DAISUKE NOGUCHI: "RAS-ho o Mochiita Kinosei Usumaku no Kosoku Teion Kesshoka Seimaku Gijutsu", CONVERTECH, vol. 38, no. 3, 15 March 2010 (2010-03-15), pages 96 - 99
Attorney, Agent or Firm:
ETO LAW & PATENT OFFICE Corp. (JP)
Legal professional corporation The Eto law patent firm (JP)
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