Title:
PHOTOCHROMIC SUBSTRATE CONTAINER
Document Type and Number:
WIPO Patent Application WO2005040011
Kind Code:
B1
Abstract:
A semiconductor wafer, substrate, or reticle storage or shipping container (10, 24) that includes a photochromic indicator of exposure to undesired electromagnetic radiation. A photochromic material is incorporated into the plastic used to fabricate at least a portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
Inventors:
BURNS JOHN (US)
FULLER MATTHEW A (US)
KING JEFFREY J (US)
FORBES MARTIN L (US)
SMITH MARK V (US)
FULLER MATTHEW A (US)
KING JEFFREY J (US)
FORBES MARTIN L (US)
SMITH MARK V (US)
Application Number:
PCT/US2004/035217
Publication Date:
June 30, 2005
Filing Date:
October 25, 2004
Export Citation:
Assignee:
ENTEGRIS INC (US)
BURNS JOHN (US)
FULLER MATTHEW A (US)
KING JEFFREY J (US)
FORBES MARTIN L (US)
SMITH MARK V (US)
BURNS JOHN (US)
FULLER MATTHEW A (US)
KING JEFFREY J (US)
FORBES MARTIN L (US)
SMITH MARK V (US)
International Classes:
B65D79/02; H01L21/673; (IPC1-7): B65D85/00; B65D85/30; B65D85/57
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