Title:
PHOTOCURABLE COMPOSITION FOR IMPRINT, METHOD OF PRODUCING CURED FILM, METHOD OF PRODUCING OPTICAL COMPONENT, METHOD OF PRODUCING CIRCUIT BOARD, AND METHOD OF PRODUCING ELECTRONIC COMPONENT
Document Type and Number:
WIPO Patent Application WO/2016/098346
Kind Code:
A1
Abstract:
The present invention relates to a photocurable composition for imprint in a condensable gas atmosphere. The composition at least includes a polymerizable compound component (A) and photopolymerization initiator component (B) and satisfies the Requirement (1): a value ECG of greater than or equal to 2.30 GPa, where ECG denotes the reduced modulus (GPa) of a photocured film prepared by exposing the photocurable composition for imprint to light at an exposure dose of 200 mJ/cm2 in an atmosphere containing a condensable gas in a concentration of 90% by volume or more.
Inventors:
SAKAMOTO KAZUMI (JP)
ITO TOSHIKI (JP)
IIMURA AKIKO (JP)
KATO JUN (JP)
YAMASHITA KEIJI (JP)
ITO TOSHIKI (JP)
IIMURA AKIKO (JP)
KATO JUN (JP)
YAMASHITA KEIJI (JP)
Application Number:
PCT/JP2015/006246
Publication Date:
June 23, 2016
Filing Date:
December 15, 2015
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
B29C59/02; H01L21/027; C08F2/50
Domestic Patent References:
| WO2013162049A1 | 2013-10-31 | |||
| WO2013080741A1 | 2013-06-06 | |||
| WO2015030151A1 | 2015-03-05 |
Foreign References:
| US20100092727A1 | 2010-04-15 | |||
| US20130011618A1 | 2013-01-10 |
Attorney, Agent or Firm:
ABE, Takuma et al. (30-2Shimomaruko 3-chome, Ohta-k, Tokyo 01, JP)
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