Title:
PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING UNEVEN PATTERN USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/079820
Kind Code:
A1
Abstract:
Disclosed is a photocurable transfer sheet which can be used advantageously for the production of an intermediate stamper in a nano-imprinting process, and which has good releasability from a mold having a fine uneven pattern to be used in the process, enables the good release between a product on which an uneven pattern has been transferred from the intermediate stamper and a photocurable resin, and has good adhesion to a base film. Also disclosed is a method for forming a fine uneven pattern using the photocurable transfer sheet.
Specifically disclosed is a photocurable transfer sheet (10) which is characterized by having a photocurable transfer layer (11) which comprises a photocurable composition and is deformable upon application of pressure, wherein the photocurable composition contains a silicone resin and/or an ethylenical compound containing a fluorine atom as a lubricating agent, and wherein the photocurable transfer layer (11) has a surface energy of 20 to 30 mN/m exclusive. Also specifically disclosed is a method for forming an uneven pattern using the photocurable transfer sheet.
More Like This:
| JPS57170525 | POSITIONING CONTROL SYSTEM FOR ALIGNMENT STAGE |
| JPS60251620 | X-RAY MASK |
| JP2009044089 | EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD AND SYSTEM |
Inventors:
INAMIYA TAKATO (JP)
HASHIMOTO MASASHI (JP)
KAIDA EIZOU (JP)
HASHIMOTO MASASHI (JP)
KAIDA EIZOU (JP)
Application Number:
PCT/JP2010/050134
Publication Date:
July 15, 2010
Filing Date:
January 08, 2010
Export Citation:
Assignee:
BRIDGESTONE CORP (JP)
INAMIYA TAKATO (JP)
HASHIMOTO MASASHI (JP)
KAIDA EIZOU (JP)
INAMIYA TAKATO (JP)
HASHIMOTO MASASHI (JP)
KAIDA EIZOU (JP)
International Classes:
H01L21/027; B29C59/02; G11B7/26; B29K33/04; B29K83/00; B29L7/00
Foreign References:
| JP2005515617A | 2005-05-26 | |||
| JPH10307201A | 1998-11-17 | |||
| JP2007055235A | 2007-03-08 | |||
| JP2006054300A | 2006-02-23 | |||
| JP2007165812A | 2007-06-28 | |||
| JP2006156735A | 2006-06-15 | |||
| US20050191419A1 | 2005-09-01 | |||
| JP2008202022A | 2008-09-04 | |||
| JP2005286222A | 2005-10-13 | |||
| JPH0963130A | 1997-03-07 | |||
| JP2007165812A | 2007-06-28 | |||
| JPH0963130A | 1997-03-07 |
Other References:
See also references of EP 2381467A4
YASUAKI KITAZAKI, TOSHIO HATA, JOURNAL OF THE ADHESION OF JAPAN, vol. 8, no. 3, 1972, pages 131 - 141
YASUAKI KITAZAKI, TOSHIO HATA, JOURNAL OF THE ADHESION OF JAPAN, vol. 8, no. 3, 1972, pages 131 - 141
Attorney, Agent or Firm:
ETOH TOSHIAKI (JP)
Toshiaki Eto (JP)
Toshiaki Eto (JP)
Download PDF: