Title:
PHOTODIODE ARRAY FOR SPECTROSCOPIC MEASUREMENT, AND SPECTROSCOPIC MEASUREMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/146816
Kind Code:
A1
Abstract:
A plurality of photodiodes arranged in one plane are classified into a plurality of groups, and a reflection-preventing film structure (either the material or the thickness) is varied for each group so that in each group the surfaces of all the photodiodes of the group are covered by the reflection-preventing film having permeation characteristics such that the permeation rate is the greatest among the wavelength band of the light incident on the photodiodes. In particular, the high permeation rate (the rate achieved up until incident light reaches the photoelectric conversion region) can be increased while avoiding, as much as possible, making the manufacturing process complex by making an SiO2 film layer (104) and an Al2O3 film layer (105) on a Si substrate (102) common to all the photodiodes, varying the top layer by wavelength, and further finely varying the film structure according to wavelength in the ultraviolet wavelength band. In this manner, it is possible to achieve high sensitivity without fail even in the ultraviolet wavelength band in a spectroscopic measurement apparatus using a photodiode array detection device.
Inventors:
TOMINAGA HIDEKI (JP)
HIROSE RYUTA (JP)
TAKUBO KENJI (JP)
SUGAWA SHIGETOSHI (JP)
KURODA RIHITO (JP)
HIROSE RYUTA (JP)
TAKUBO KENJI (JP)
SUGAWA SHIGETOSHI (JP)
KURODA RIHITO (JP)
Application Number:
PCT/JP2013/058857
Publication Date:
October 03, 2013
Filing Date:
March 26, 2013
Export Citation:
Assignee:
SHIMADZU CORP (JP)
UNIV TOHOKU (JP)
UNIV TOHOKU (JP)
International Classes:
G01J3/36; G02B1/11
Foreign References:
| JP2003139611A | 2003-05-14 | |||
| JP2001013304A | 2001-01-19 | |||
| JPH05188202A | 1993-07-30 | |||
| JPH06229829A | 1994-08-19 |
Other References:
See also references of EP 2833106A4
"NMOS linear image sensor S3901/S3904 series", HAMAMATSU PHOTONICS K. K., 17 January 2012 (2012-01-17), Retrieved from the Internet
"NMOS linear image sensor S3901/S3904 series", HAMAMATSU PHOTONICS K. K., 17 January 2012 (2012-01-17), Retrieved from the Internet
Attorney, Agent or Firm:
Kyoto International Patent Law Office (JP)
Patent business corporation Kyoto international patent firm (JP)
Patent business corporation Kyoto international patent firm (JP)
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